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Stability of the Surface Passivation Properties of Atomic Layer Deposited Aluminum Oxide in Damp Heat Conditions

Author(s): Ismo T.S. Heikkinen, George Koutsourakis, Sebastian Wood Person, Ville Vähänissi, Fernando A. Castro Person and Hele Savin
Journal: AIP Conference Proceedings
Year: 2019
Month: August
Day: 17
Volume: 2147
Pages: 050003
DOI: 10.1063/1.5123852
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