Title: |
Stability of the Surface Passivation Properties of Atomic Layer Deposited Aluminum Oxide in Damp Heat Conditions |
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Author(s): | , , , , and |
Journal: | AIP Conference Proceedings |
Year: | 2019 |
Month: | August |
Day: | 17 |
Volume: | 2147 |
Pages: | 050003 |
DOI: | 10.1063/1.5123852 |
File URL: | https://doi.org/10.1063/1.5123852 |