Title: |
Stability of the Surface Passivation Properties of Atomic Layer Deposited Aluminum Oxide in Damp Heat Conditions |
|---|---|
| Author(s): | , , , , and |
| Journal: | AIP Conference Proceedings |
| Year: | 2019 |
| Month: | August |
| Day: | 17 |
| Volume: | 2147 |
| Pages: | 050003 |
| DOI: | 10.1063/1.5123852 |
| File URL: | https://doi.org/10.1063/1.5123852 |