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AlOx Surface Passivation of Black Silicon by Spatial ALD: Stability under Light Soaking and Damp Heat Exposure

Author(s): Ismo T.S. Heikkinen, George Koutsourakis, Sauli Virtanen, Marko Yli-Koski, Sebastian Wood Person, Ville Vähänissi, Emma Salmi, Fernando A. Castro Person and Hele Savin
Journal: Journal of Vacuum Science and Technology A
Year: 2020
Month: January
Day: 8
Volume: 38
Pages: 022401
DOI: 10.1116/1.5133896
Web URL:

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