Title: |
AlOx Surface Passivation of Black Silicon by Spatial ALD: Stability under Light Soaking and Damp Heat Exposure |
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Author(s): | , , , , , , , and |
Journal: | Journal of Vacuum Science and Technology A |
Year: | 2020 |
Month: | January |
Day: | 8 |
Volume: | 38 |
Pages: | 022401 |
DOI: | 10.1116/1.5133896 |
Web URL: | https://avs.scitation.org/doi/10.1116/1.5133896 |